The process of manufacturing or constructing miniature structures or devices of micrometer (one millionth of a meter) scales and smaller is termed as microfabrication.

The size of these structures or devices may vary from the width of a human hair to smaller than a single human cell.

The ability to build such small structures/devices has actually helped in the technological advancements in computers, green energy technology, consumer electronics, and so on. Depending on the device/structure being built, microfabrication techniques vary. Nanotechnology is a similar field, however, it deals with even smaller elements or components.

It was the semiconductor industry that pioneered the usage of microfabricated parts. The 1940s and 1950s saw a rise in the usage of microfabrication technology as a result of the invention of the transistor and integrated circuit. The evolving technology made it possible for more complex integrated circuits to be built, thus paving the way to the powerful microchips available in the market today.

Nowadays, a lot of industries rely on the microfabrication technology. Many of the smart machines like smartphones, car airbag sensors, and so on are fitted with micro-electro-mechanical systems. Solar panels and fuel cells use microfabricated parts. From the particle physics field to the microbiology field, microfabrication technologies and techniques are used in research applications.

Following are the major concepts and principles of microfabrication.

Microlithography

Lithographic patterning methods capable of manufacturing materials/devices on a fine scale is termed as microlithography. Microlithographic materials/devices have features smaller than 10 micrometers. An example for microlithography is photolithography, which is often applied to semiconductor manufacturing of microchips. It is also commonly used in the fabrication of MEMS (Microelectromechanical systems) devices. A number of innovative microlithographic technologies (X-ray lithography, magneto-lithography, extreme ultraviolet lithography, and so on) already exist , and a lot more are in the stages of development as well.

Doping

The process of introducing impurities intentionally into a pure intrinsic semiconductor in the production of a semiconductor, for the purpose of electrical property modulation is termed as doping. The impurities are dependent upon the semiconductor type and its intended properties.

Thin films

A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. In various applications, the synthesis controlled) of thin films is a fundamental step. The advancement in the thin film deposition techniques in the last century enabled for technological breakthroughs in areas like electronic semiconductor devices, magnetic recording media, storage, energy generation, and so on.

Etching

The process of using potent acids to create a design in the metal by pouring it into the unprotected parts of a metal surface is termed as etching. Microfabrication etching is a vital technique in the modern technology. For example, the process of etching is used in circuit boards.

Bonding

During semiconductor device fabrication, the method of wire bonding is used for the purpose of making interconnections between an IC (integrated circuit) or other semiconductor devices and its packaging. It is considered as the most flexible and cost-effective interconnect technology.

Polishing

The process of creating a shiny and smooth surface with the help of a chemical action or by just rubbing it is termed as polishing. Chemical-mechanical polishing is used in semiconductor fabrication. Vapor polishing is used for optical clarity.

Microfabrication, in effect, is a collection of the above-mentioned technologies. Etching or lithography is not connected to manufacturing, however, these technologies are also utilized in the making of microdevices.